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Authors: FOZZA AC ROCH J KLEMBERGSAPIEHA JE KRUSE A HOLLANDER A WERTHEIMER MR

Citation: Ac. Fozza et al., OXIDATION AND ABLATION OF POLYMERS BY VACUUM UV-RADIATION FROM LOW-PRESSURE PLASMAS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 131(1-4), 1997, pp. 205-210