Authors:
NEUBECK K
NITSCHE R
HAHN H
ALBERTS L
WOLF GK
FRIZ M
Citation: K. Neubeck et al., ION-BEAM-ASSISTED DEPOSITION OF ZRO2 THIN-FILMS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 106(1-4), 1995, pp. 110-115