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In-process monitoring of grinding and polishing of optical surfaces
Authors:
van der Bijl, RJM Fahnle, OW van Brug, H Braat, JJM
Citation:
Rjm. Van Der Bijl et al., In-process monitoring of grinding and polishing of optical surfaces, APPL OPTICS, 39(19), 2000, pp. 3300-3303
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