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Results: 2
Neural network structures for optimal control of LPCVD reactors
Authors: Fakhr-Eddine, K Cabassud, M Le Lann, MV Couderc, JP
Citation: K. Fakhr-eddine et al., Neural network structures for optimal control of LPCVD reactors, NEURAL C AP, 9(3), 2000, pp. 172-180
Application of neural networks to the modeling of LPCVD reactors - Deposition of in-situ boron-doped silicon
Authors: Fakhr-Eddine, K Cabassud, M Lann, MV Couderc, JP
Citation: K. Fakhr-eddine et al., Application of neural networks to the modeling of LPCVD reactors - Deposition of in-situ boron-doped silicon, CHEM ENGN J, 72(2), 1999, pp. 171-182
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