Authors:
Fedosenko, G
Korzec, D
Schwabedissen, A
Engemann, J
Braca, E
Kenny, JM
Citation: G. Fedosenko et al., Comparison of diamond-like carbon films synthesized by 2.45 GHz microwave and 13.56 MHz multi-jet radiofrequency plasma sources, DIAM RELAT, 10(3-7), 2001, pp. 920-926
Authors:
Fedosenko, G
Schwabedissen, A
Korzec, D
Engemann, J
Citation: G. Fedosenko et al., Diamond-like carbon film deposition by a 13.56 MHz hollow cathode RF-RF system using different precursor gases, SURF COAT, 142, 2001, pp. 693-697
Citation: G. Fedosenko et al., Deposition of diamond-like carbon films by a hollow cathode multi-jet rf plasma system, SURF COAT, 133, 2000, pp. 535-539