Authors: Jouan, S Baudry, H Dutartre, D Fellous, C Laurens, M Lenoble, D Marty, M Monroy, A Perrotin, A Ribot, P Vincent, G Chantre, A

Citation: S. Jouan et al., Suppression of boron transient-enhanced diffusion in SiGeHBTs by a buried carbon layer, IEEE DEVICE, 48(8), 2001, pp. 1765-1769