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Results: 1
Growth of Ru and RuO2 films by metal-organic chemical vapour deposition
Authors:
Frohlich, F Machajdik, D Cambel, V Fedor, J Pisch, A Lindner, J
Citation:
F. Frohlich et al., Growth of Ru and RuO2 films by metal-organic chemical vapour deposition, J PHYS IV, 11(PR3), 2001, pp. 325-332
Risultati:
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