Citation: Ah. Gabor et Ck. Ober, GROUP-TRANSFER POLYMERIZATION OF TERT-BUTYL METHACRYLATE AND [3-(METHACRYLOXY)PROPYL]PENTAMETHYLDISILOXANE - SYNTHESIS AND CHARACTERIZATIONOF HOMOPOLYMERS AND RANDOM AND BLOCK-COPOLYMERS, Chemistry of materials, 8(9), 1996, pp. 2272-2281
Citation: Ah. Gabor et al., LITHOGRAPHIC PROPERTIES OF POLY(TERT-BUTYL METHACRYLATE)-BASED BLOCK AND RANDOM COPOLYMER RESISTS DESIGNED FOR 193 NM WAVELENGTH EXPOSURE TOOLS, Chemistry of materials, 8(9), 1996, pp. 2282-2290
Authors:
GABOR AH
LEHNER EA
MAO GP
SCHNEGGENBURGER LA
OBER CK
Citation: Ah. Gabor et al., SYNTHESIS AND LITHOGRAPHIC CHARACTERIZATION OF BLOCK-COPOLYMER RESISTS CONSISTING OF BOTH POLY(STYRENE) BLOCKS AND HYDROSILOXANE-MODIFIED POLY(DIENE) BLOCKS, Chemistry of materials, 6(7), 1994, pp. 927-934