Authors: WEBB SF GADDY GA BLUMENTHAL R

Citation: Sf. Webb et al., DISTRIBUTION OF SPECIES WITHIN AN ETHYLENE ELECTRON-CYCLOTRON RESONANCE-MICROWAVE PLASMA, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(4), 1998, pp. 2148-2152

Authors: WEBB SF GADDY GA BLUMENTHAL R

Citation: Sf. Webb et al., DETERMINING THE NUMBER OF CHEMICAL STEPS RESPONSIBLE, FOR THE DISTRIBUTION OF MOLECULAR-SPECIES WITHIN AN ELECTRON-CYCLOTRON-RESONANCE MICROWAVE PLASMA, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(3), 1997, pp. 647-653

Authors: GADDY GA WEBB SF BLUMENTHAL R

Citation: Ga. Gaddy et al., MASS-SPECTROMETRIC DETERMINATION OF THE PERCENT DISSOCIATION OF A HIGH-DENSITY CHLORINE PLASMA, Applied physics letters, 71(22), 1997, pp. 3206-3208