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STUDIES OF REACTIVE SPUTTERING OF MULTIPHASE CHROMIUM NITRIDE
Authors: NYBERG T SKYTT P GALNANDER B NENDER C NORDGREN J BERG S
Citation: T. Nyberg et al., STUDIES OF REACTIVE SPUTTERING OF MULTIPHASE CHROMIUM NITRIDE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(2), 1997, pp. 248-252
IN-SITU DIAGNOSTIC STUDIES OF REACTIVE COSPUTTERING FROM 2 TARGETS BYMEANS OF SOFT-X-RAY AND OPTICAL-EMISSION SPECTROSCOPY
Authors: NYBERG T SKYTT P GALNANDER B NENDER C NORDGREN J BERG S
Citation: T. Nyberg et al., IN-SITU DIAGNOSTIC STUDIES OF REACTIVE COSPUTTERING FROM 2 TARGETS BYMEANS OF SOFT-X-RAY AND OPTICAL-EMISSION SPECTROSCOPY, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(1), 1997, pp. 145-148
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