Authors:
NYBERG T
SKYTT P
GALNANDER B
NENDER C
NORDGREN J
BERG S
Citation: T. Nyberg et al., STUDIES OF REACTIVE SPUTTERING OF MULTIPHASE CHROMIUM NITRIDE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(2), 1997, pp. 248-252
Authors:
NYBERG T
SKYTT P
GALNANDER B
NENDER C
NORDGREN J
BERG S
Citation: T. Nyberg et al., IN-SITU DIAGNOSTIC STUDIES OF REACTIVE COSPUTTERING FROM 2 TARGETS BYMEANS OF SOFT-X-RAY AND OPTICAL-EMISSION SPECTROSCOPY, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(1), 1997, pp. 145-148