Authors:
VIRETON E
GANAU P
MACKOWSKI JM
MICHEL C
PINARD L
REMILLIEUX A
LAPRAT P
Citation: E. Vireton et al., SIO2-TA2O5 SPUTTERING YIELDS - SIMULATED AND EXPERIMENTAL RESULTS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 95(1), 1995, pp. 34-40