Authors: JAIN A GELATOS AV KODAS TT HAMPDENSMITH MJ MARSH R MOGAB CJ

Citation: A. Jain et al., SELECTIVE CHEMICAL-VAPOR-DEPOSITION OF COPPER USING (HFAC) COPPER(I) VINYLTRIMETHYLSILANE IN THE ABSENCE AND PRESENCE OF WATER, Thin solid films, 262(1-2), 1995, pp. 52-59

Authors: GELATOS AV JAIN A MARSH R MOGAB CJ

Citation: Av. Gelatos et al., CHEMICAL-VAPOR-DEPOSITION OF COPPER FOR ADVANCED ON-CHIP INTERCONNECTS, MRS bulletin, 19(8), 1994, pp. 49-54

Authors: GELATOS AV MARSH R KOTTKE M MOGAB CJ

Citation: Av. Gelatos et al., CHEMICAL-VAPOR-DEPOSITION OF COPPER FROM CU-VAPOR(1 PRECURSORS IN THEPRESENCE OF WATER), Applied physics letters, 63(20), 1993, pp. 2842-2844