Authors: GETTY WD GEDDES JB

Citation: Wd. Getty et Jb. Geddes, SIZE-SCALABLE, 2.45-GHZ ELECTRON-CYCLOTRON-RESONANCE PLASMA SOURCE USING PERMANENT-MAGNETS AND WAVE-GUIDE COUPLING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(1), 1994, pp. 408-415

Authors: JUNCK KL GETTY WD

Citation: Kl. Junck et Wd. Getty, COMPARISON OF AR ELECTRON-CYCLOTRON-RESONANCE PLASMAS IN 3 MAGNETIC-FIELD CONFIGURATIONS .1. ELECTRON-TEMPERATURE AND PLASMA-DENSITY, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(5), 1994, pp. 2767-2774

Authors: JUNCK KL GETTY WD

Citation: Kl. Junck et Wd. Getty, COMPARISON OF ARGON ELECTRON-CYCLOTRON-RESONANCE PLASMAS IN 3 MAGNETIC-FIELD CONFIGURATIONS .2. ENERGY-DISTRIBUTION OF ARGON IONS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(3), 1994, pp. 760-768