Authors: CRESSWELL MW ALLEN RA GUTHRIE WF SNIEGOWSKI JJ GHOSHTAGORE RN LINHOLM LW

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Authors: CRESSWELL MW SNIEGOWSKI JJ GHOSHTAGORE RN ALLEN RA GUTHRIE WF GURNELL AW LINHOLM LW DIXSON RG TEAGUE EC

Citation: Mw. Cresswell et al., RECENT DEVELOPMENTS IN ELECTRICAL LINEWIDTH AND OVERLAY METROLOGY FORINTEGRATED-CIRCUIT FABRICATION PROCESSES, JPN J A P 1, 35(12B), 1996, pp. 6597-6609