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Results: 26-29/29
Authors:
NAKANO T
GIAPIS KP
GOTTSCHO RA
LEE TC
SADEGHI N
Citation: T. Nakano et al., ION VELOCITY DISTRIBUTIONS IN HELICON WAVE PLASMAS - MAGNETIC-FIELD AND PRESSURE EFFECTS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2046-2056
Authors:
AYDIL ES
GIAPIS KP
GOTTSCHO RA
DONNELLY VM
YOON E
Citation: Es. Aydil et al., AMMONIA PLASMA PASSIVATION OF GAAS IN DOWNSTREAM MICROWAVE AND RADIOFREQUENCY PARALLEL PLATE PLASMA REACTORS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(2), 1993, pp. 195-205
Authors:
GIAPIS KP
SADEGHI N
MARGOT J
GOTTSCHO RA
LEE TCJ
Citation: Kp. Giapis et al., LIMITS TO ION ENERGY CONTROL IN HIGH-DENSITY GLOW-DISCHARGES - MEASUREMENT OF ABSOLUTE METASTABLE ION CONCENTRATIONS, Journal of applied physics, 73(11), 1993, pp. 7188-7194
Authors:
AYDIL ES
ZHOU Z
GIAPIS KP
CHABAL Y
GREGUS JA
GOTTSCHO RA
Citation: Es. Aydil et al., REAL-TIME, INSITU MONITORING OF SURFACE-REACTIONS DURING PLASMA PASSIVATION OF GAAS, Applied physics letters, 62(24), 1993, pp. 3156-3158