Authors: ELSTNER F EHRLICH A GIEGENGACK H KUPFER H RICHTER F

Citation: F. Elstner et al., STRUCTURE AND PROPERTIES OF TITANIUM NITRIDE THIN-FILMS DEPOSITED AT LOW-TEMPERATURES USING DIRECT-CURRENT MAGNETRON SPUTTERING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(2), 1994, pp. 476-483