Authors: PAULSEN RE KYONO CS WANG Y KLEIN KM LIM IS TINKLER S BELLAMAK B ODLE DW ZHOU ZX DAHL P GIOVANETTO M MAKWANA J PATEL S RENO C LENAHAN PM BILLMAN CA

Citation: Re. Paulsen et al., PROCESS INTEGRATION OF AN INTERLEVEL DIELECTRIC (ILDO) MODULE USING ABUILDING-IN RELIABILITY APPROACH, I.E.E.E. transactions on electron devices, 45(3), 1998, pp. 655-664