Authors: BALANDIN AN GARKUSHA BF GLUKHIKH IV GRAD AG ZHDANOV IV ZHELTOV VA KUZNETSOV VS YUDIN AM YASEVICH VY YATSENKO BP

Citation: An. Balandin et al., EXCIMER-LASER FOR MICROTECHNOLOGY, Instruments and experimental techniques, 37(5), 1994, pp. 606-611