Authors: BLINOV LM GOLOVKIN AG KAGANOV LI OPARIN VB RAZHAVSKI AA SHTERENBERG AM VOLODKO VV ZYN VI

Citation: Lm. Blinov et al., TETRACHLOROSILANE CONSUMPTION IN RADIO-FREQUENCY GLOW-DISCHARGE, Plasma chemistry and plasma processing, 18(4), 1998, pp. 509-533