Authors: GROTJOHN TA TAN W GOPINATH V SRIVASTAVA AK ASMUSSEN J

Citation: Ta. Grotjohn et al., MODELING THE ELECTROMAGNETIC-EXCITATION OF A COMPACT ECR ION FREE-RADICAL SOURCE, Review of scientific instruments, 65(5), 1994, pp. 1761-1765

Authors: GOPINATH V SALBERT GT GROTJOHN TA REINHARD DK

Citation: V. Gopinath et al., ELECTRON-CYCLOTRON-RESONANCE SPUTTER REMOVAL OF SIO2 ON SILICON-WAFERS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2067-2070