Authors:
GROTJOHN TA
TAN W
GOPINATH V
SRIVASTAVA AK
ASMUSSEN J
Citation: Ta. Grotjohn et al., MODELING THE ELECTROMAGNETIC-EXCITATION OF A COMPACT ECR ION FREE-RADICAL SOURCE, Review of scientific instruments, 65(5), 1994, pp. 1761-1765
Authors:
GOPINATH V
SALBERT GT
GROTJOHN TA
REINHARD DK
Citation: V. Gopinath et al., ELECTRON-CYCLOTRON-RESONANCE SPUTTER REMOVAL OF SIO2 ON SILICON-WAFERS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2067-2070