Authors: GRAPPERHAUS MJ KRIVOKAPIC Z KUSHNER MJ

Citation: Mj. Grapperhaus et al., DESIGN ISSUES IN IONIZED METAL PHYSICAL VAPOR-DEPOSITION OF COPPER, Journal of applied physics, 83(1), 1998, pp. 35-43

Authors: HOEKSTRA RJ GRAPPERHAUS MJ KUSHNER MJ

Citation: Rj. Hoekstra et al., INTEGRATED PLASMA EQUIPMENT MODEL FOR POLYSILICON ETCH PROFILES IN ANINDUCTIVELY-COUPLED PLASMA REACTOR WITH SUBWAFER AND SUPERWAFER TOPOGRAPHY, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(4), 1997, pp. 1913-1921

Authors: GRAPPERHAUS MJ KUSHNER MJ

Citation: Mj. Grapperhaus et Mj. Kushner, A SEMIANALYTIC RADIO-FREQUENCY SHEATH MODEL INTEGRATED INTO A 2-DIMENSIONAL HYBRID MODEL FOR PLASMA PROCESSING REACTORS, Journal of applied physics, 81(2), 1997, pp. 569-577

Authors: KUSHNER MJ COLLISON WZ GRAPPERHAUS MJ HOLLAND JP BARNES MS

Citation: Mj. Kushner et al., A 3-DIMENSIONAL MODEL FOR INDUCTIVELY-COUPLED PLASMA-ETCHING REACTORS- AZIMUTHAL SYMMETRY, COIL PROPERTIES, AND COMPARISON TO EXPERIMENTS, Journal of applied physics, 80(3), 1996, pp. 1337-1344

Authors: HOULBERG WA ATTENBERGER SE GRAPPERHAUS MJ

Citation: Wa. Houlberg et al., DENSITY PROFILE CONTROL IN A FUSION-REACTOR USING PELLET INJECTION, Nuclear fusion, 34(1), 1994, pp. 93-108