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Results: 1-25 | 26-29 |
Results: 26-29/29
METROLOGY FOR REPLICATED X-RAY MASKS USING AN ELECTRON-BEAM MACHINE
Authors: LUCIANI L DIFABRIZIO E GRELLA L BACIOCCHI M FIGLIOMENI M GENTILI M MASTROGIACOMO L MAGGIORA R KRASPENOVA A REILLY M
Citation: L. Luciani et al., METROLOGY FOR REPLICATED X-RAY MASKS USING AN ELECTRON-BEAM MACHINE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2463-2467
DEVELOPMENT OF AN ELECTRON-BEAM PROCESS FOR THE FABRICATION OF X-RAY NANOMASKS
Authors: GENTILI M GRELLA L DIFABRIZIO E LUCIANI L BACIOCCHI M FIGLIOMENI M MAGGIORA R MASTROGIACOMO L CERRINA F
Citation: M. Gentili et al., DEVELOPMENT OF AN ELECTRON-BEAM PROCESS FOR THE FABRICATION OF X-RAY NANOMASKS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2938-2942
MICROFABRICATION OF PHASE-SHIFTING ZONE PLATES FOR HARD X-RAYS
Authors: WHITE V BAJIKAR S DENTON D CERRINA F LAI B YUN WB LEGNINI D XIAO Y CHRZAS J DIFABRIZIO E GRELLA L BACIOCCHI M
Citation: V. White et al., MICROFABRICATION OF PHASE-SHIFTING ZONE PLATES FOR HARD X-RAYS, Microelectronic engineering, 21(1-4), 1993, pp. 99-102
CH4 H2 RIE OF INGAASP/INP MATERIALS - AN APPLICATION TO DFB LASER FABRICATION/
Authors: MENEGHINI G BOSCHIS L CORIASSO C STANO A GENTILI M GRELLA L FIGLIOMENI M
Citation: G. Meneghini et al., CH4 H2 RIE OF INGAASP/INP MATERIALS - AN APPLICATION TO DFB LASER FABRICATION/, Microelectronic engineering, 21(1-4), 1993, pp. 321-324
Risultati: 1-25 | 26-29 |