Authors: BRODIE AD CHEN ZW JAU J MEISBURGER D GRENON B

Citation: Ad. Brodie et al., INSPECTION OF OPTICAL PHASE-SHIFTING MASKS WITH AN AUTOMATED ELECTRON-BEAM SYSTEM, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3595-3599