INSPECTION OF OPTICAL PHASE-SHIFTING MASKS WITH AN AUTOMATED ELECTRON-BEAM SYSTEM

Authors
BRODIE AD CHEN ZW JAU J MEISBURGER D GRENON B
Citation
Ad. Brodie et al., INSPECTION OF OPTICAL PHASE-SHIFTING MASKS WITH AN AUTOMATED ELECTRON-BEAM SYSTEM, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3595-3599
Citations number
8
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3595 - 3599
Database
ISI
SICI code
1071-1023(1994)12:6<3595:IOOPMW>2.0.ZU;2-C