Authors: GRIDER DT OZTURK MC ASHBURN SP WORTMAN JJ

Citation: Dt. Grider et al., ULTRA-SHALLOW RAISED P-N JUNCTIONS FORMED BY DIFFUSION FROM SELECTIVELY DEPOSITED IN-SITU DOPED SI0.7GE0.3(), Journal of electronic materials, 24(10), 1995, pp. 1369-1376