Citation: Ma. Guggenberger et Kj. Huttinger, THE KINETICS OF THE CATALYZED CVD OF MONOCRYSTALLINE ALPHA-SILICON NITRIDE FILAMENTS, CHEMICAL VAPOR DEPOSITION, 3(1), 1997, pp. 51-58
Authors:
LINNER B
GUGGENBERGER MA
HUTTINGER KJ
KLEEBE HJ
Citation: B. Linner et al., CHEMICAL-VAPOR-DEPOSITION OF SILICON-NITRIDE FILAMENTS FROM SILICON SUBHYDRIDES AND AMMONIA, Journal of the European Ceramic Society, 16(1), 1996, pp. 15-23