Authors: DELEONIBUS S MARTIN F HEITZMANN M GUIBERT JC PAPON AM

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Authors: DELEONIBUS S HEITZMANN M GOBIL Y MARTIN F DEMOLLIENS O GUIBERT JC TOFFOLI A

Citation: S. Deleonibus et al., DIFFERENTIAL BODY EFFECT ANALYSIS AND OPTIMIZATION OF THE LARGE TILT IMPLANTED SLOPED SHALLOW TRENCH ISOLATION PROCESS (LATI-STI), JPN J A P 2, 35(8A), 1996, pp. 971-973