Authors:
GUILHALMENC C
MORICEAU H
ASPAR B
AUBERTONHERVE AJ
LAMURE JM
Citation: C. Guilhalmenc et al., CHARACTERIZATION BY ATOMIC-FORCE MICROSCOPY OF THE SOI LAYER TOPOGRAPHY IN LOW-DOSE SIMOX MATERIALS, Materials science & engineering. B, Solid-state materials for advanced technology, 46(1-3), 1997, pp. 29-32
Authors:
PRIEUR E
GUILHALMENC C
HARTWIG J
OHLER M
GARCIA A
ASPAR B
Citation: E. Prieur et al., THREADING DISLOCATIONS IN SILICON LAYER PRODUCED BY SEPARATION BY IMPLANTED OXYGEN PROCESS, Journal of applied physics, 80(4), 1996, pp. 2113-2120