Authors: PANIEZ PJ GUINOT JA MORTINI B ROSILIO C

Citation: Pj. Paniez et al., EXTENSIVE THERMAL CHARACTERIZATION OF ADVANCED RESISTS BY MODULATED TEMPERATURE DSC (MT-DSC) - APPLICATION TO ACRYLATE BASED 193 NM RESISTS, Microelectronic engineering, 42, 1998, pp. 367-370