EXTENSIVE THERMAL CHARACTERIZATION OF ADVANCED RESISTS BY MODULATED TEMPERATURE DSC (MT-DSC) - APPLICATION TO ACRYLATE BASED 193 NM RESISTS

Authors
PANIEZ PJ GUINOT JA MORTINI B ROSILIO C
Citation
Pj. Paniez et al., EXTENSIVE THERMAL CHARACTERIZATION OF ADVANCED RESISTS BY MODULATED TEMPERATURE DSC (MT-DSC) - APPLICATION TO ACRYLATE BASED 193 NM RESISTS, Microelectronic engineering, 42, 1998, pp. 367-370
Citations number
10
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
42
Year of publication
1998
Pages
367 - 370
Database
ISI
SICI code
0167-9317(1998)42:<367:ETCOAR>2.0.ZU;2-8
Abstract
The extensive thermal characterization of a typical acrylate based 193 nm resist is presented using the new MT-DSC technique. Unlike convent ional DSC, the deconvolution of the reversing component with the nonre versing deprotection signal allows the determination of the Tg of thes e systems. The influence of the concentration in THP protecting group is investigated. The results obtained point out some of the problems e ncountered in the design of acrylate based resists such as Tg value an d microphase separation.