Authors: SARASWAT KC APTE PP BOOTH L CHEN YZ DANKOSKI PCP DEGERTEKIN FL FRANKLIN GF KHURIYAKUB BT MOSLEHI MM SCHAPER C GYUGYI PJ LEE YJ PEI J WOOD SC

Citation: Kc. Saraswat et al., RAPID THERMAL MULTIPROCESSING FOR A PROGRAMMABLE FACTORY FOR ADAPTABLE MANUFACTURING OF ICS, IEEE transactions on semiconductor manufacturing, 7(2), 1994, pp. 159-175