Authors: Wang, LP Tang, BY Gan, KY Tian, XB Chu, PK

Citation: Lp. Wang et al., Ion kinetic energy control in dual plasma deposition of thin films, J VAC SCI A, 19(6), 2001, pp. 2851-2855

Authors: Wang, LP Gan, KY Tian, XB Tang, BY Chu, PK

Citation: Lp. Wang et al., Characteristics and design of metal vacuum arc plasma source power supply for pulsed-mode plasma immersion ion implantation, REV SCI INS, 71(12), 2000, pp. 4435-4437