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Results:
1-2
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Results: 2
Dynamic plowing nanolithography on polymethylmethacrylate using an atomic force microscope
Authors:
Heyde, M Rademann, K Cappella, B Geuss, M Sturm, H Spangenberg, T Niehus, H
Citation:
M. Heyde et al., Dynamic plowing nanolithography on polymethylmethacrylate using an atomic force microscope, REV SCI INS, 72(1), 2001, pp. 136-141
The precision of the femtosecond-pulse laser ablation of TiN films on silicon
Authors:
Bonse, J Geuss, M Baudach, S Sturm, H Kautek, W
Citation:
J. Bonse et al., The precision of the femtosecond-pulse laser ablation of TiN films on silicon, APPL PHYS A, 69, 1999, pp. S399-S402
Risultati:
1-2
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