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Citation: Rj. Jackman et al., Microfluidic systems with on-line UV detection fabricated in photodefinable epoxy, J MICROM M, 11(3), 2001, pp. 263-269

Authors: Zhang, X Chen, KS Ghodssi, R Ayon, AA Spearing, SM

Citation: X. Zhang et al., Residual stress and fracture in thick tetraethylorthosilicate (TEOS) and silane-based PECVD oxide films, SENS ACTU-A, 91(3), 2001, pp. 373-380