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Results: 1
Thermal distortion predictions of a silicon wafer during exposure in a scalpel tool
Authors:
Gianoulakis, S Liddle, J Stanton, S Gallatin, G
Citation:
S. Gianoulakis et al., Thermal distortion predictions of a silicon wafer during exposure in a scalpel tool, MICROEL ENG, 53(1-4), 2000, pp. 357-360
Risultati:
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