Authors:
Wolff, S
Grosse, A
Schimper, HJ
Giehl, AR
Kuhnke, M
Grote, R
Fouckhardt, H
Citation: S. Wolff et al., Technology and realization of metallic curved waveguide mirrors in polymerfilm waveguides based on anisotropic plasma etching, J VAC SCI A, 19(1), 2001, pp. 87-89