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Results: 1
Fast approach to kinetic simulations of RF discharge in plasma reactors
Authors:
Schweigert, VA Alexandrov, AL Gimelshtein, SF Ivanov, MS
Citation:
Va. Schweigert et al., Fast approach to kinetic simulations of RF discharge in plasma reactors, PLASMA SOUR, 9(1), 2000, pp. B1-B3
Risultati:
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