Authors:
White, DA
Goodlin, BE
Gower, AE
Boning, DS
Chen, H
Sawin, HH
Dalton, TJ
Citation: Da. White et al., Low open-area endpoint detection using a PCA-based T-2 statistic and Q statistic on optical emission spectroscopy measurements, IEEE SEMIC, 13(2), 2000, pp. 193-207