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Bourdelle, KK
Gossmann, HJL
Chaudhry, S
Agarwal, A
Citation: Kk. Bourdelle et al., The effect of fluorine from BF2 source/drain extension implants on performance of PMOS transistors with thin gate oxides, IEEE ELEC D, 22(6), 2001, pp. 284-286
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Venezia, VC
Pelaz, L
Gossmann, HJL
Haynes, TE
Rafferty, CS
Citation: Vc. Venezia et al., Binding energy of vacancy clusters generated by high-energy ion implantation and annealing of silicon, APPL PHYS L, 79(9), 2001, pp. 1273-1275
Authors:
Kalyanaraman, R
Haynes, TE
Holland, OW
Gossmann, HJL
Rafferty, CS
Gilmer, GH
Citation: R. Kalyanaraman et al., Binding energy of vacancies to clusters formed in Si by high-energy ion implantation, APPL PHYS L, 79(13), 2001, pp. 1983-1985