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Results:
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Results: 3
Co-axial multicusp source for low axial energy spread ion beam production
Authors:
Lee, Y Gough, RA Leung, KN Vujic, J Williams, MD Zahir, N
Citation:
Y. Lee et al., Co-axial multicusp source for low axial energy spread ion beam production, NUCL INST A, 433(3), 1999, pp. 579-586
Maskless ion beam lithography system
Authors:
Lee, Y Gough, RA King, TJ Ji, Q Leung, KN McGill, RA Ngo, VV Williams, MD Zahir, N
Citation:
Y. Lee et al., Maskless ion beam lithography system, MICROEL ENG, 46(1-4), 1999, pp. 469-472
Plasma source for ion and electron beam lithography
Authors:
Lee, Y Gough, RA Leung, KN Vujic, J Williams, MD Zahir, N Fallman, W Tockler, M Bruenger, W
Citation:
Y. Lee et al., Plasma source for ion and electron beam lithography, J VAC SCI B, 16(6), 1998, pp. 3367-3369
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