Authors: Goustouridis, D Tsoukalas, D Normand, P Kontos, AG Raptis, Y Anastassakis, E

Citation: D. Goustouridis et al., Parameters influencing the flatness and stability of capacitive pressure sensors fabricated with wafer bonding, SENS ACTU-A, 76(1-3), 1999, pp. 403-408