Authors:
Goustouridis, D
Tsoukalas, D
Normand, P
Kontos, AG
Raptis, Y
Anastassakis, E
Citation: D. Goustouridis et al., Parameters influencing the flatness and stability of capacitive pressure sensors fabricated with wafer bonding, SENS ACTU-A, 76(1-3), 1999, pp. 403-408