Authors:
Filippi, RG
Gribelyuk, MA
Joseph, T
Kane, T
Sullivan, TD
Clevenger, LA
Costrini, G
Gambino, J
Iggulden, RC
Kiewra, EW
Ning, XJ
Ravikumar, R
Schnabel, RF
Stojakovic, G
Weber, SJ
Gignac, LM
Hu, CK
Rath, DL
Rodbell, KP
Citation: Rg. Filippi et al., Electromigration in AlCu lines: comparison of Dual Damascene and metal reactive ion etching, THIN SOL FI, 388(1-2), 2001, pp. 303-314
Authors:
Guha, S
Cartier, E
Gribelyuk, MA
Bojarczuk, NA
Copel, MC
Citation: S. Guha et al., Atomic beam deposition of lanthanum- and yttrium-based oxide thin films for gate dielectrics, APPL PHYS L, 77(17), 2000, pp. 2710-2712
Citation: Ma. Gribelyuk et al., Effect of Mo doping on accelerated growth of C-54TiSi(2): Evidence for template mechanism, J APPL PHYS, 86(5), 1999, pp. 2571-2575