Authors:
Borsoni, G
Gros-Jean, M
Korwin-Pawlowski, ML
Laffitte, R
Le Roux, V
Vallier, L
Citation: G. Borsoni et al., Oxide nanodots and ultrathin layers fabricated on silicon using nonfocusedmulticharged ion beams, J VAC SCI B, 18(6), 2000, pp. 3535-3538