Authors:
Schuenemann, M
Grosser, V
Leutenbauer, R
Bauer, G
Schaefer, W
Reichl, H
Citation: M. Schuenemann et al., A highly flexible design and production framework for modularized microelectromechanical systems, SENS ACTU-A, 73(1-2), 1999, pp. 153-168