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Citation: Ct. Black et al., Integration of self-assembled diblock copolymers for semiconductor capacitor fabrication, APPL PHYS L, 79(3), 2001, pp. 409-411

Authors: Shang, HL White, MH Guarini, KW Solomon, P Cartier, E McFeely, FR Yurkas, JJ Lee, WC

Citation: Hl. Shang et al., Interface studies of tungsten gate metal-oxide-silicon capacitors, APPL PHYS L, 78(20), 2001, pp. 3139-3141