Authors:
Gunzel, R
Shevshenko, N
Matz, W
Mucklich, A
Celis, JP
Citation: R. Gunzel et al., Structural investigation and wear resistance of submicron TiN coatings obtained by a hybrid plasma immersion ion implantation process, SURF COAT, 142, 2001, pp. 978-983
Authors:
Gunzel, R
Hornauer, U
Rogozin, AI
Astrelin, VT
Citation: R. Gunzel et al., Basic investigations of an integrated modulator for plasma immersion ion implantation, SURF COAT, 136(1-3), 2001, pp. 47-50
Authors:
Moller, W
Parascandola, S
Telbizova, T
Gunzel, R
Richter, E
Citation: W. Moller et al., Surface processes and diffusion mechanisms of ion nitriding of stainless steel and aluminium, SURF COAT, 136(1-3), 2001, pp. 73-79
Authors:
Uglov, VV
Fedotova, JA
Kuleshov, AK
Danilyuk, AL
Kvasov, NT
Gunzel, R
Reuther, R
Richter, E
Citation: Vv. Uglov et al., Evolution of microstructure of instrumental AISI M2 steel after plasma immersion nitrogen and carbon implantation, SURF COAT, 136(1-3), 2001, pp. 226-230
Authors:
Abramof, E
Beloto, AF
Ueda, M
Gunzel, R
Reuther, H
Citation: E. Abramof et al., Reciprocal space mapping of silicon implanted with nitrogen by plasma immersion ion implantation, NUCL INST B, 175, 2001, pp. 229-234
Authors:
Ueda, M
Reuther, H
Gunzel, R
Beloto, AF
Abramof, E
Berni, LA
Citation: M. Ueda et al., High dose nitrogen and carbon shallow implantation in Si by plasma immersion ion implantation, NUCL INST B, 175, 2001, pp. 715-720
Authors:
Hornauer, U
Gunzel, R
Reuther, H
Richter, E
Wieser, E
Moller, W
Schumacher, G
Dettenwanger, F
Schutze, M
Citation: U. Hornauer et al., Protection of gamma-based TiAl against high temperature oxidation using ion implantation of chlorine, SURF COAT, 125(1-3), 2000, pp. 89-93
Authors:
Gunzel, R
Betzl, M
Alphonsa, I
Ganguly, B
John, PI
Mukherjee, S
Citation: R. Gunzel et al., Plasma-source ion implantation compared with glow-discharge plasma nitriding of stainless steel, SURF COAT, 112(1-3), 1999, pp. 307-309
Citation: U. Stephan et al., Polymer etching and deposition of amorphous silicon using a VHF coaxial helix plasma source, SURF COAT, 112(1-3), 1999, pp. 384-388