Authors: Semyonov, OG Gurey, AE Kanavin, AP Tikhomirov, AA

Citation: Og. Semyonov et al., Applications of micropinch x-ray source, J VAC SCI B, 19(4), 2001, pp. 1235-1240

Authors: Semyonov, OG Gurey, AE Tikhomirov, AA

Citation: Og. Semyonov et al., Experimental model of industrial x-ray source MSX-1 with a vacuum spark for x-ray lithography, J VAC SCI B, 19(2), 2001, pp. 482-486