Authors: CELLIERS P DASILVA LB DANE CB MROWKA S NORTON M HARDER J HACKEL L MATTHEWS DL FIEDOROWICZ H BARTNIK A MALDONADO JR ABATE JA

Citation: P. Celliers et al., OPTIMIZATION OF X-RAY SOURCES FOR PROXIMITY LITHOGRAPHY PRODUCED BY AHIGH AVERAGE POWER ND-GLASS LASER, Journal of applied physics, 79(11), 1996, pp. 8258-8268