Authors:
REN F
VARTULI CB
PEARTON SJ
ABERNATHY CR
DONOVAN SM
MACKENZIE JD
SHUL RJ
ZOLPER JC
LOVEJOY ML
BACA AG
HAGEROTTCRAWFORD M
JONES KA
Citation: F. Ren et al., COMPARISON OF OHMIC METALLIZATION SCHEMES FOR INGAALN, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(3), 1997, pp. 802-806
Authors:
VARTULI CB
PEARTON SJ
ABERNATHY CR
MACKENZIE JD
SHUL RJ
ZOLPER JC
LOVEJOY ML
BACA AG
HAGEROTTCRAWFORD M
Citation: Cb. Vartuli et al., THERMAL-STABILITY OF W, WSIX, AND TI AL OHMIC CONTACTS TO INGAN, INN,AND INALN/, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 3520-3522
Authors:
LEE JW
VARTULI CB
ABERNATHY CR
MACKENZIE JD
MILEHAM JR
PEARTON SJ
SHUL RJ
ZOLPER JC
HAGEROTTCRAWFORD M
ZAVADA JM
WILSON RG
SCHWARTZ RN
Citation: Jw. Lee et al., ETCHING PROCESSES FOR FABRICATION OF GAN INGAN/ALN MICRODISK LASER STRUCTURES/, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 3637-3640
Authors:
VARTULI CB
PEARTON SJ
ABERNATHY CR
SHUL RJ
HOWARD AJ
KILCOYNE SP
PARMETER JE
HAGEROTTCRAWFORD M
Citation: Cb. Vartuli et al., HIGH-DENSITY PLASMA-ETCHING OF III-V NITRIDES, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(3), 1996, pp. 1011-1014
Authors:
ABERNATHY CR
PEARTON SJ
MACKENZIE JD
MILEHAM JR
BHARATAN SR
KRISHNAMOORTHY V
JONES KS
HAGEROTTCRAWFORD M
SHUL RJ
KILCOYNE SP
ZAVADA JM
ZHANG D
KOLBAS RM
Citation: Cr. Abernathy et al., GROWTH AND FABRICATION OF GAN-INGAN MICRODISK LASER STRUCTURES, Solid-state electronics, 39(2), 1996, pp. 311-313